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Oxford Plasmapro100 Pecvd

Name: Oxford Plasmapro100 Pecvd
Brand: Dongguan Boldward Communication Technology Co., Ltd
SKU: NfgYJqkEuQrb
Price: 300000.00 USD
Availability: InStock

US$300,000.00 1 Set (MOQ)

Port:

Shenzhen, China

Payment Terms:

T/T

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Dongguan Boldward Communication Technology Co., Ltd

Guangdong, China

Last Login Date:

Jul 01, 2025

Main Products:

Test Machine PV Tesst machine Solar Light

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Product Description

Company Info

Basic Info.

Model NO.

OXFORD Plasmapro100

Product Description

Oxford Instruments' PlasmaPro 100 PECVD

Oxford Instruments' PlasmaPro 100 process modules offer a 200mm platform with

single wafer and multi-wafer batch capability. The process modules offer excellent

uniformity, high throughput and high precision processes.

Our tools are well proven, with over 90% uptime and processes that are guaranteed to ensure rapid start-up during installation.

The PlasmaPro 100 range supports a number of markets including but not limited to; MEMS & Sensors, Optoelectronics,

Discrete Devices and Nanotechnology. It is flexible enough to be used in research and development, with the

build quality to satisfy production needs.

PlasmaPro 100 platforms may be clustered to combine technologies

and processes with either cassette or single wafer loading options

• Compatible with all wafer sizes up to 200mm

• Rapid change between wafer sizes

• Global customer support network

• Low cost of ownership and ease of serviceability

• Compact footprint, flexible layout

• CE marked, safety compliant to EN 13849-1

Oxford Instruments PC4500 software is renowned for its clarity and ease of use, making it quick

to train process operators while retaining full functionality for users.

Software features:

• The front end visual interface is configured exactly for your system

• Control a tool cluster from a single interface and PC

• Process recipes are written, stored and recalled through the same software, building a library

• Password controlled user login allows different levels of user access and tasks, from 'one-button' run operation

to full system functions

• Advanced Graphical Log Viewer:

• Continuous system data logging ensures traceability

of each wafer and process run

• Quickly graph parameters from multiple runs on one

or more graphs

• Save graph of a "gold standard" run to easily

compare against data from subsequent runs

• Quick scroll and zoom graph axes

The PECVD process modules are specifically designed to produce excellent uniformity and

high rate films, with control of film properties such as refractive index, stress, electrical

characteristics and wet chemical etch rate.

PECVD features:

• In-situ chamber cleaning and end-pointing

• Electrically grounded lower electrodes available:

• 400ºC electrode - typical processes are SiO2 , Si3 N4 and

SiON, amorphous Si and SiC

• 1200ºC electrode - in addition to processes above,

the electrode enables Si Nanowires, high temperature

PECVD films with a wide variety of chemistries

• An optimised upper electrode design , operating in high

pressure, high RF power, high flow regimes, enables SiO2 ,

Si3 N4 and SiON, amorphous Si deposition at increased rates

whilst maintaining excellent film properties and uniformity

across the wafe

• RF powered showerhead with optimised gas delivery,

provides uniform plasma processing with LF/RF switching

allowing precise control of film stress

Address: No. 125, Tangqing West Road, Shitanpu Tangxia Dongguan Guangdong Cn 523717, Dongguan, Guangdong, China

Business Type: Manufacturer/Factory

Business Range: Consumer Electronics, Electrical & Electronics, Industrial Equipment & Components, Instruments & Meters, Lights & Lighting, Manufacturing & Processing Machinery, Metallurgy, Mineral & Energy, Security & Protection, Sporting Goods & Recreation, Tools & Hardware

Main Products: Test Machine PV Tesst machine Solar Light

Company Introduction: Dongguan Boldward Communication Technology Co., Ltd. Possesses a complete set of production management, quality control and product testing procedures. Our main business includes environmental test chambers, generator equipment, generator remote control systems, testing instruments for the photovoltaic industry, semiconductor industry, photovoltaic power station, and other customized quality inspection instruments, as well as the development of testing system software. We also provide one-stop services for laboratory project planning, design, production, installation and after-sales service.

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