Basic Info.
Temperature
Ordinary Temperature
Certification
CE, ISO9001
Connection Mode
Internal Thread
Product Description
MEMC2300 series intelligent mass flow controller is composed of three parts: mass flow meter, proportional solenoid valve, signal processing and control module.
The mass flow meter is composed of the body, sensor, signal processing and display module.
The sensor adopts MEMS micro-electromechanical chip manufactured by CMOS semiconductor process. The working principle of flow measurement adopts the principle of thermal diffusion. The center of the chip is equipped with a heater, and the upstream and downstream sides of the heater are respectively equipped with thermopiles and thermopile temperature measuring elements. A cavity is provided at the bottom of the heater and thermopile array, which can efficiently detect the heat change of the heater. After the heating element introduces a constant current, a corresponding temperature field is formed in the vicinity of the heating element. The flow of the medium redistributes the local temperature field. Because the change in the temperature field has a linear relationship with the fluid mass flow rate, the fluid mass flow rate can be inversely calculated by accurately measuring the temperature field. The sensor uses the principle of thermal diffusion to directly measure the mass flow, basically without pressure and temperature compensation, and applies thermal diffusion to the micrometer scale. Therefore, the mass flowmeter manufactured by this sensor has the characteristics of high accuracy, wide range, sensitivity, and accurate measurement.
The flow meter body is used to construct a safe and accurate measurement channel. The signal processing and display unit is used to process the sensor signal and convert the signal into the monitoring data required by the user to display on the LCD screen.
The proportional solenoid valve is an electromagnetically driven control valve combined with a flow meter to form a closed-loop flow control system, which can control the gas flow stably and accurately. The proportional solenoid valve is a normally closed valve with AC and DC power supply. It has low hysteresis, high repeatability, and sensitive response, ensuring good dynamic characteristics of the flow controller, and has a wide range of Cv flow coefficient. With elastic valve seat seals, the valve can ensure air-tight shut-off and cut-off. Integral compression fittings can be provided to install the valve block.
The signal processing and control module, the proportional solenoid valve and the mass flow meter form a closed-loop mass flow control system. The module is designed with excellent performance and high reliability embedded system. It integrates advanced adaptive control algorithms, which can effectively suppress random errors in measurement data, so the system has the characteristics of rapid response, high accuracy and good stability.
Application: Photovoltaic material process equipment, semiconductor process equipment, lithium battery material process equipment, medical and pharmaceutical gas equipment, laboratory micro reaction device, gas mixing system, gas chromatograph, optical fiber process equipment.Features: - High sensitivity
- High reliability
- Large range ratio
- Fast response
- No preheating
- Excellent zero and temperature stability
- Support micro flow measurement and control
Technical Parameter:
Pressure: 0~1.6 MPa
Flow rate: 0.05~10000mL/min(DN1~6); 1~1000 L/min(DN6~25)
Temperature: -20~60ºC
Range ratio: 1:50
Response time: < 1s F.S.
Accuracy level: ±1.5% F.S.
Repeatability: < 0.25% F.S.
Sensitivity: < 0.1% F.S.
Communication: RS485 / 4-20mA
Address:
No. 1 Lianda Rd, Huangpu, Guangzhou, Guangdong, China
Business Type:
Manufacturer/Factory
Business Range:
Industrial Equipment & Components, Instruments & Meters, Manufacturing & Processing Machinery, Metallurgy, Mineral & Energy
Management System Certification:
ISO 9001
Company Introduction:
Guangzhou Weiliang Technology Co., Ltd. Was established in 2011. The company is committed to the independent R&D and production of fluid sensing, help customers optimize systems and processes, accurately measure and control, save energy, reduce emissions and low down costs.
KNUDSENS® Is our new brand for the international business.
The company have automatic standard flow experimental equipment, and equipped with imported calculation simulation software and self-developed related supporting software, have signal acquisition and processing equipment and corresponding software, a batch of equipment for aging test, high and low temperature test, vibration test, temperature and humidity test, salt spray test, etc., provides a strong guarantee for product development and product quality.