PECVD

Features of equipments
Full automatic control on process time, temperature, air flow, valve action, reaction chamber pressure by industrial PC.
Imported close-loop pressure control system with high reliability.
Imported erosion-proof SS fittings and valves ensuring bubble-tightness of pneumatic system.

Perfect alarm and safe interlock devices.
Alarm for over-/less-temperature, MFC, reaction chamber pressure, RF, high atmospheric pressure, N2 pressure and water flow etc.

Type
The process is completely free from outside interference with full quality control; The hazardous exhausted air is collected with orientation and expelled in concentration. Better safety and environment friendliness.
Wafer loading qty.: 400PCS/tube
Cleanliness of purification workstation Class 100 ( Class10000 workshop)
Automation degree: Automatic temperature and process control. The master thermostat module is made by Eurotherm Co. With ± 0.25degree control precision.

Wafer feeding method: Cantilever push-pull vessel. Our company adopts plain shaft transmission system which has the advantage of more stable driving than threaded shaft system, thus avoiding vibration of the push-pull vessel due to deformation of threaded shaft after long service. It may prevent from dead lock of threaded shaft which obstructs from drawing it off the furnace hearth in case of sudden power off.