Multi-Piece Plasma Enhanced Atomic Layer Deposition System for The Deposition of Thin Films of Temperature-Sensitive Materials
Price
Min. Order Reference FOB Price
1 Piece US$31,000.00-35,000.00 / Piece
Sepcifications
- Type Coating Production Line
- Coating Vacuum Coating
- Certification CE
- Condition New
- Transport Package Standard Export Wooden Box Packaging
- Trademark CYKY
- Origin Zhengzhou Henan China
- Wafer Dimension 8 Inch and Below
- Wafer Temperature Rt-500c,Controlling Precision +-0.1c
- Number of Precursor Two Precursor Lines, Optional More Lines
- Temperature of Precursor Lines Rt-200c,Controlling Precision +-0.1c
- Ald Valve Swagelok Ald Swift Valve
- Background Vacuum <5*10-3torr
- Gas Carrier System N2 or Ar
Product Description
Multi-piece plasma enhanced atomic layer deposition system for the deposition of thin films of temperature-sensitive materials Introduction of PEALD System: CY-KMT-500S Atomic Layer Deposition System I a fully automatic, productive, single-chamber system specially developed for middle-scale ...
