Min. Order Reference FOB Price
20 L Negotiable
Product Description
Specification: Trichlorosilane is a silicon precursor for epitaxial silicon-containing thin films, especially for the preparation of starting wafers. Specifications: Purity %: ≥99.85 Resistivity: ≥ 300 ohm-cm Boron: ≤ 0.1 ppba silicon Total Carbon: ≤ 5 ppma Iron: ...